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CVD & ALD Precursors
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Bis(2,2,6,6-tetramethyl-3,5-heptanedionato)(1,5-cyclooctadiene)ruthenium(II)Cas Number: 329735-79-7 Compound CID: 72376349Formula: C₃0H₅0O₄Ru Molecular Weight: 575.8SMILES: CC(C)(C)C(=CC(=O)C(C)(C)C)O.CC(C)(C)C(=CC(=O)C(C)(C)C)O.C1C[CH][CH]CC[CH][CH]1.[Ru]InChIKey: QPJRIRWTZWRZLB-COYDWXKQSA-NInChI: InChI=1S/2C11H20O2.C8H12.Ru/c2*1-10(2,3)8(12)7-9(13)11(4,5)6;1-2-4-6-8-7-5-3-1;/h2*7,12H,1-6H3;1-2,7-8H,3-6H2;/b2*8-7+;;
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Pentakis (dimethylamino) tantalum(V)Cas Number: 19824-59-0 Compound CID: 140614Formula: Ta(N(CH3)2)5 Molecular Weight: 401.33IUPAC Name: dimethylazanide;tantalum(5+)SMILES: C[N-]C.C[N-]C.C[N-]C.C[N-]C.C[N-]C.[Ta+5]InChIKey: VSLPMIMVDUOYFW-UHFFFAOYSA-NInChI: InChI=1S/5C2H6N.Ta/c5*1-3-2;/h5*1-2H3;/q5*-1;+5Synonyms: PDMAT | TADMA | Ta(NMe2)5
