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CVD & ALD Precursors

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  1. Pentakis (dimethylamino) tantalum(V)
    Cas Number: 19824-59-0        Compound CID:  140614
    Formula:  Ta(N(CH3)2)5        Molecular Weight: 401.33
    IUPAC Name:  dimethylazanide;tantalum(5+)
    SMILES:  C[N-]C.C[N-]C.C[N-]C.C[N-]C.C[N-]C.[Ta+5]
    InChIKey: VSLPMIMVDUOYFW-UHFFFAOYSA-N
    InChI:  InChI=1S/5C2H6N.Ta/c5*1-3-2;/h5*1-2H3;/q5*-1;+5
    Synonyms: PDMAT | TADMA | Ta(NMe2)5
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