CVD &amp; ALD Precursors-Aladdin Scientific

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Trimethyl phosphate
- ≥99.99999% metals basis
Cas Number: 512-56-1 EC Number: 208-144-8 Compound CID: 10541

Formula: C₃H₉O₄P Molecular Weight: 140.07

IUPAC Name: trimethyl phosphate

SMILES: COP(=O)(OC)OC

InChIKey: WVLBCYQITXONBZ-UHFFFAOYSA-N

InChI: InChI=1S/C3H9O4P/c1-5-8(4,6-2)7-3/h1-3H3

Synonyms: TMPO | NCGC00248617-01 | P(O)(OCH3)3 | CAS-512-56-1 | EINECS 208-144-8 | TRIMETHYL PHOSPHATE [HSDB] | Trimethylfosfat...
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