CVD &amp; ALD Precursors-Aladdin Scientific

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Tris(dimethylamino)silane
- ≥99%,≥99.999% metals basis
Cas Number: 15112-89-7 Compound CID: 6335325

Formula: ((CH₃)₂N)₃SiH Molecular Weight: 161.32

SMILES: CN(C)[Si](N(C)C)N(C)C

InChIKey: GIRKRMUMWJFNRI-UHFFFAOYSA-N

InChI: InChI=1S/C6H18N3Si/c1-7(2)10(8(3)4)9(5)6/h1-6H3

Synonyms: s20900 | TDMAS | EINECS 239-165-0 | SCHEMBL35636 | Silanetriamine, N,N,N',N',N'',N''-hexamethyl-;N,N,N',N',N'',N''-He...
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