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CVD & ALD Precursors

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  1. Hexakis(dimethylamino)dialuminum 98%
      Grade & Purity: 
    • ≥98%,≥99.9% metals basis
    Cas Number: 32093-39-3
    Formula:  C12H36Al2N6        Molecular Weight: 318.42
    IUPAC Name:  N-[bis(dimethylamino)alumanyl]-N-methylmethanamine
    SMILES:  CN(C)[Al](N(C)C)N(C)C.CN(C)[Al](N(C)C)N(C)C
    InChIKey: JGZUJELGSMSOID-UHFFFAOYSA-N
    InChI:  InChI=1S/6C2H6N.2Al/c6*1-3-2;;/h6*1-2H3;;/q6*-1;2*+3
    Synonyms: Tris(dimethylamino)aluminum dimer | BIS(MU-DIMETHYLAMINO)TETRAKIS(DIMETHYLAMINO)DIALUMINUM | Tris(dimethylamido)alumi...
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