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CVD & ALD Precursors

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  1. Bis(2,2,6,6-tetramethyl-3,5-heptanedionato)(1,5-cyclooctadiene)ruthenium(II)
      Grade & Purity: 
    • ≥99%,≥99.9% metals basis
    Cas Number: 329735-79-7        Compound CID:  72376349
    Formula:  C₃0H₅0O₄Ru        Molecular Weight: 575.8
    SMILES:  CC(C)(C)C(=CC(=O)C(C)(C)C)O.CC(C)(C)C(=CC(=O)C(C)(C)C)O.C1C[CH][CH]CC[CH][CH]1.[Ru]
    InChIKey: QPJRIRWTZWRZLB-COYDWXKQSA-N
    InChI:  InChI=1S/2C11H20O2.C8H12.Ru/c2*1-10(2,3)8(12)7-9(13)11(4,5)6;1-2-4-6-8-7-5-3-1;/h2*7,12H,1-6H3;1-2,7-8H,3-6H2;/b2*8-7+;;
  2. Triethyl phosphate
    Cas Number: 78-40-0        EC Number: 201-114-5
    Formula:  C6H15O4P        Molecular Weight: 182.15
    IUPAC Name:  triethyl phosphate
    SMILES:  CCOP(=O)(OCC)OCC
    InChIKey: DQWPFSLDHJDLRL-UHFFFAOYSA-N
    InChI:  InChI=1S/C6H15O4P/c1-4-8-11(7,9-5-2)10-6-3/h4-6H2,1-3H3
    Synonyms: TRIETHYL PHOSPHATE|78-40-0|Triethylphosphate|Phosphoric acid, triethyl ester|Tris(ethyl) phosphate|Triethoxyphosphine...
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