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CVD & ALD Precursors

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  1. Ruthenium acetylacetonate
      Grade & Purity: 
    • ≥99.8% metals basis
    Cas Number: 14284-93-6        EC Number: 238-193-0        Compound CID:  5462865
    Formula:  C15H21O6Ru        Molecular Weight: 398.39
    IUPAC Name:  (Z)-4-hydroxypent-3-en-2-one;ruthenium
    SMILES:  CC(=CC(=O)C)O.CC(=CC(=O)C)O.CC(=CC(=O)C)O.[Ru]
    InChIKey: IYWJIYWFPADQAN-LNTINUHCSA-N
    InChI:  InChI=1S/3C5H8O2.Ru/c3*1-4(6)3-5(2)7;/h3*3,6H,1-2H3;/b3*4-3-;
    Synonyms: Ru(acac)3 | Ruthenium(III) acetylacetonate | Tris(2,4-pentanedionato)ruthenium(III) | Acetylacetone Ruthenium(III) Salt
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