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CVD & ALD Precursors

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  1. Silicon(IV) bromide
      Grade & Purity: 
    • ≥99.995% metals basis
    Cas Number: 7789-66-4        Compound CID:  82247
    Formula:  SiBr4        Molecular Weight: 347.70
    IUPAC Name:  tetrabromosilane
    SMILES:  [Si](Br)(Br)(Br)Br
    InChIKey: AIFMYMZGQVTROK-UHFFFAOYSA-N
    InChI:  InChI=1S/Br4Si/c1-5(2,3)4
    Synonyms: Silicon tetrabromide | Tetrabromosilane
  2. Hexakis(ethylamino)disilane
      Grade & Purity: 
    • ≥99.995% metals basis
    Cas Number: 532980-53-3
    Formula:  C12H36N6Si2        Molecular Weight: 320.63
    IUPAC Name:  N-[bis(ethylamino)-[tris(ethylamino)silyl]silyl]ethanamine
    SMILES:  CCN[Si](NCC)(NCC)[Si](NCC)(NCC)NCC
    InChIKey: WMAAIGILTZEOHE-UHFFFAOYSA-N
    InChI:  InChI=1S/C12H36N6Si2/c1-7-13-19(14-8-2,15-9-3)20(16-10-4,17-11-5)18-12-6/h13-18H,7-12H2,1-6H3
    Synonyms: DTXSID40462800 | N-[bis(ethylamino)-[tris(ethylamino)silyl]silyl]ethanamine | Hexakis(ethylamino)disilane (99.995%-Si...
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