CVD & ALD Precursors-Aladdin Scientific

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Hafnium chloride
- ≥99.5%
Cas Number: 13499-05-3 EC Number: 236-826-5

Formula: Cl₄Hf Molecular Weight: 320.3

IUPAC Name: tetrachlorohafnium

SMILES: Cl[Hf](Cl)(Cl)Cl

InChIKey: PDPJQWYGJJBYLF-UHFFFAOYSA-J

InChI: InChI=1S/4ClH.Hf/h4*1H;/q;;;;+4/p-4

Synonyms: Hafnium tetrachloride | Tetrachlorohafnium
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Triethyl phosphate
- ≥99.5%
Cas Number: 78-40-0 EC Number: 201-114-5

Formula: C₆H₁₅O₄P Molecular Weight: 182.15

IUPAC Name: triethyl phosphate

SMILES: CCOP(=O)(OCC)OCC

InChIKey: DQWPFSLDHJDLRL-UHFFFAOYSA-N

InChI: InChI=1S/C6H15O4P/c1-4-8-11(7,9-5-2)10-6-3/h4-6H2,1-3H3

Synonyms: BP-31112 | EN300-19166 | QIH4K96K7J | A865040 | AKOS000120082 | NSC2677 | NSC-2677 | SCHEMBL21887 | Z104473010 | TRIE...
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Aluminum chloride
- ≥99.5%
Cas Number: 7446-70-0 EC Number: 231-208-1 Compound CID: 254784083

Formula: AlCl₃ Molecular Weight: 133.34

Synonyms: Aluminum trichloride anhydrous Aluminium chloride Aluminum trichloride
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