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CVD & ALD Precursors

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  1. Tetraethyl orthosilicate
      Grade & Purity: 
    • ≥99%(GC)
    Cas Number: 78-10-4        EC Number: 201-083-8        Compound CID:  6517
    Formula:  C8H20O4Si        Molecular Weight: 208.33
    IUPAC Name:  tetraethyl silicate
    SMILES:  CCO[Si](OCC)(OCC)OCC
    InChIKey: BOTDANWDWHJENH-UHFFFAOYSA-N
    InChI:  InChI=1S/C8H20O4Si/c1-5-9-13(10-6-2,11-7-3)12-8-4/h5-8H2,1-4H3
    Synonyms: TEOS | MFCD00009062 | Silicic acid, tetraethyl ester | Etylu krzemian [Polish] | tetraethylortho silicate | EC 201-08...
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