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CVD & ALD Precursors

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  1. Zirconium(IV) t-butoxide
      Grade & Purity: 
    • ≥97%
    Cas Number: 2081-12-1
    Formula:  C16H36O4Zr        Molecular Weight: 383.68
    IUPAC Name:  2-methylpropan-2-ol;zirconium
    SMILES:  CC(C)(C)O.CC(C)(C)O.CC(C)(C)O.CC(C)(C)O.[Zr]
    InChIKey: WRMYASGYMABHCC-UHFFFAOYSA-N
    InChI:  InChI=1S/4C4H10O.Zr/c4*1-4(2,3)5;/h4*5H,1-3H3;
    Synonyms: zirconium(iv) t-butoxide | SCHEMBL108395 | Zirconium(IV) tert-butoxide, packaged for use in deposition systems | MFCD...
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