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  1. Hexamethyl disilylamine(HMDS)
      Grade & Purity: 
    • AR
    • ≥98%
    Cas Number: 999-97-3        EC Number: 213-668-5
    Formula:  C6H19NSi2        Molecular Weight: 161.39
    IUPAC Name:  [dimethyl-(trimethylsilylamino)silyl]methane
    SMILES:  C[Si](C)(C)N[Si](C)(C)C
    InChIKey: FFUAGWLWBBFQJT-UHFFFAOYSA-N
    InChI:  InChI=1S/C6H19NSi2/c1-8(2,3)7-9(4,5)6/h7H,1-6H3
    Synonyms: HMDS | Bis(trimethylsilyl)amine | 1,1,1,3,3,3-Hexamethyldisilazane
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