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Tris(dimethylamino)silane - packaged for use in deposition systems, high purity , CAS No.15112-89-7

COA

Grade & Purity:

packaged for use in deposition systems

Cas Number: 15112-89-7
Molecular Weight: 161.32
PubChem CID: 6335325

In stock

Item Number

T432153

Grouped product items
SKU	Size	Availability	Price	Qty
T432153-25g	25g	Available within 8-12 weeks(?) Production requires sourcing of materials. We appreciate your patience and understanding.	$931.90

Basic Description

Synonyms	s20900 \| TDMAS \| EINECS 239-165-0 \| SCHEMBL35636 \| Silanetriamine, N,N,N',N',N'',N''-hexamethyl-;N,N,N',N',N'',N''-Hexamethylsilanetriamine \| DTXSID00884786 \| MFCD00048006 \| BCP30199 \| FT-0637184 \| BRN 1901643 \| [bis(dimethylamino)silyl]dimethylamine \| Tr
Specifications & Purity	packaged for use in deposition systems
Product Description	Application Tris(dimethylamino)silane (TDMAS) is used as an organosilicon source for the deposition of Si oxynitride; carbonitride; nitride and oxide thin films. It is also used to form multicomponent silicon containing thin films. The depositions can be carried out at low substrate temperatures (<150). The melting point and vapor pressure of TDMAS is in a suitable working range; thus making it a very good vapor deposition precursor.

Taxonomic Classification

Taxonomy Tree

Kingdom Organic compounds
- Superclass Organic salts
  - Class Organic metal salts
    - Subclass Organic metalloid salts

Kingdom	Organic compounds
Superclass	Organic salts
Class	Organic metal salts
Subclass	Organic metalloid salts
Intermediate Tree Nodes	Not available
Direct Parent	Organic metalloid salts
Alternative Parents	Organonitrogen compounds Hydrocarbon derivatives
Molecular Framework	Aliphatic acyclic compounds
Substituents	Organic metalloid salt - Organic nitrogen compound - Hydrocarbon derivative - Organonitrogen compound - Aliphatic acyclic compound
Description	This compound belongs to the class of organic compounds known as organic metalloid salts. These are organic salt compounds containing a metalloid atom in its ionic form.
External Descriptors	Not available
1. Djoumbou Feunang Y, Eisner R, Knox C, Chepelev L, Hastings J, Owen G, Fahy E, Steinbeck C, Subramanian S, Bolton E, Greiner R, and Wishart DS. ClassyFire: Automated Chemical Classification With A Comprehensive, Computable Taxonomy. Journal of Cheminformatics, 2016, 8:61. DOI: 10.1186/s13321-016-0174-y

Names and Identifiers

INCHI	InChI=1S/C6H18N3Si/c1-7(2)10(8(3)4)9(5)6/h1-6H3
InChIKey	GIRKRMUMWJFNRI-UHFFFAOYSA-N
Smiles	CN(C)[Si](N(C)C)N(C)C
Isomeric SMILES	CN(C)[Si](N(C)C)N(C)C
WGK Germany	3
RTECS	VV5800000
PubChem CID	6335325
Molecular Weight	161.32

Certificates（CoA,COO,BSE/TSE and Analysis Chart)

C of A & Other Certificates(BSE/TSE, COO):

Analytical Chart:

Chemical and Physical Properties

Flash Point(°F)	17.6 - 32 °F
Flash Point(°C)	-8 - 0 °C
Boil Point(°C)	142 °C
Melt Point(°C)	−90 °C
Molecular Weight	160.310 g/mol
XLogP3
Hydrogen Bond Donor Count	0
Hydrogen Bond Acceptor Count	3
Rotatable Bond Count	3
Exact Mass	160.127 Da
Monoisotopic Mass	160.127 Da
Topological Polar Surface Area	9.700 Å²
Heavy Atom Count	10
Formal Charge	0
Complexity	74.000
Isotope Atom Count	0
Defined Atom Stereocenter Count	0
Undefined Atom Stereocenter Count	0
Defined Bond Stereocenter Count	0
Undefined Bond Stereocenter Count	0
The total count of all stereochemical bonds	0
Covalently-Bonded Unit Count	1

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