Oxygen plasma treatment-enhanced humidity sensing performance of MoS2 nanoparticles-anchored nitrogen-doped laser-induced graphene

The monitoring of humidity has elicited considerable interest in diverse fields. Nevertheless, the intricate nature of preparatory procedures employed for humidity sensors poses a formidable challenge in the pursuit of a streamlined, expeditious, and highly efficient technique for fabricating humidity-sensitive materials. Herein, the fundamental formation principle of polyimide (PI) film serves as the underpinning for the application of a swift and effective laser direct writing technique in creating a composite integrating MoS 2 nanoparticles anchored within nitrogen-doped laser-induced graphene (MoS 2 @NLIG). Subsequently, a rapid low-temperature oxygen plasma treatment is administered to enhance humidity sensing capabilities of the MoS 2 @NLIG composite. The oxygen plasma treatment-enhanced MoS 2 @NLIG humidity sensor exhibits exceptional capability in detecting relative humidity (RH) with a significant sensitivity of 61,219.97 Ω/%RH across an extensive range from 11% to 95%RH, while maintaining a hysteresis as minimal as 3.72%. Moreover, the sensor exhibits outstanding response and recovery times with respective values of 9 s and 15.5 s. Additionally, the humidity sensor demonstrates the capacity to identify human exhalation, potentially serving as a valuable electronic device for monitoring clinical respiration.