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Deposition of microcrystalline diamond films in H2 microwave plasma with graphite powder as hydrocarbon precursor

THIN SOLID FILMS [2019]
Kaili Yao, Bing Dai, Lei Yang, Guoyang Shu, Jiwen Zhao, Kang Liu, Wenxin Cao, Victor Ralchenko, Jiecai Han, Jiaqi Zhu
[10.1016/j.tsf.2018.10.044]
MATERIALS

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