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Synthesis, characterization, and thermal properties of novel silicon 1,1,3,3-tetramethylguanidinate derivatives and use as single-source chemical vapor deposition precursors

APPLIED ORGANOMETALLIC CHEMISTRY [2019]
Xiao Ma, Chongying Xu, Zhibiao Mao, Peiyu Ji, Chenggang Jin, Dongsheng Xu, Yuqiang Ding
[10.1002/aoc.5349]
MATERIALS

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