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High-Performance Thin-Film Transistors and Inverters Based on ALD-Derived Ultrathin Al2O3-Passivated CeO2 Bilayer Gate Dielectrics

IEEE TRANSACTIONS ON ELECTRON DEVICES [2022]
Leini Wang, Gang He, Wenhao Wang, Xiaofen Xu, Bo He, Xiaoyu Wu, Yongchun Zhang
[10.1109/TED.2022.3140405]
MATERIALS

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